Excimer Laser Cavity Optics
   Graph / Diagram

Specifications

 

Material:

VUV CaF2

Parallelism:

< 3 arc min.

Clear Aperture:

> 80% of central dimension

Chamfer:

0.3mm ´ 45°

Surface Figure:

l/10 at 632.8nm

Surface Quality:

20-10 scratch-dig

Power:

Up to 1-4 J/cm2