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Specifications |
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Material: |
VUV CaF2, UV Fused Silica |
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Parallelism: |
< 3 arc min |
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Clear Aperture: |
> 85% of central dimension |
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Chamfer: |
0.3mm ´ 45° |
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Surface Figure: |
l/10 at 632.8nm |
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Surface Quality: |
20-10 for VUV CaF2
10-5 for UV Fused Silica |
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Power: |
Up to 1J/cm2, ArF
Up to 4J/cm2, KrF |
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Part No |
Diameter |
Thickness |
A.O.I. |
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ArF (193nm) |
KrF (248nm) |
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RX-193-0-UF-1025 |
RX-248-0-UF-1025 |
1.00” |
0.250” |
0° |
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RX-193-0-UF-1420 |
RX-248-0-UF-1420 |
36.0mm |
5.0mm |
0° |
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RX-193-0-UF-1520 |
RX-248-0-UF-1520 |
1.50” |
5.0mm |
0° |
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RX-193-0-UF-2038 |
RX-248-0-UF-2038 |
2.00” |
0.375” |
0° |
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RX-193-45-UF-1025 |
RX-248-45-UC-1025 |
1.00” |
0.250” |
45° |
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RX-193-45-UF-1420 |
RX-248-45-UC-1420 |
36.0mm |
5.0mm |
45° |
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RX-193-45-UF-1520 |
RX-248-45-UC-1520 |
1.50” |
5.0mm |
45° |
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RX-193-45-UF-2038 |
RX-248-45-UC-2038 |
2.00” |
0.375” |
45° | |
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